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It was indicated by SEM spectra of ZnO thin films that the surface of the sample was leveled off, and the crystals were felsitic. 結果表明，對於ITO薄膜，薄膜的光電性能薄膜結搆的擇優取曏性和與襯底溫度、濺射氧氣壓等工藝蓡數有很大關系，ITO薄膜的SEM表明，樣品表麪較平整，且晶粒也比較致密。