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By comparing to the summarized competing next-generation lithography (NGL) technologies, the advantages of immersion lithography were presented. 概括了具有竞争力的下一代光刻技术,并对比了浸没式光刻的优势;
It will also use copper interconnects, low-k, strain silicon and other features. Like 32-nm, Intel will make use of 193-nm immersion lithography. 这款产品将使用Intel第三代HKMG工艺,第五代硅应变技术,另外与32nm类似,22nm制程仍将继续使用193nm液浸式光刻技术。
An apparatus and method for maintaining immersion fluid (212) in the gap adjacent the projection lens (16) during the exchange of a work piece (208) in a lithography machine (10) is disclosed. 本发明公开一种设备和方法,用于在更换平板印刷机(10)中工 件(208)期间,将浸没流体(212)保持在邻接投射透镜(16)的间 隙中。 ip.com
权威例句
Immersion lithography has been used in production since 2004, but Intel will be pushing this technology to the extreme. FORBES: Stimulating Technology
Inside those arenas the key to building the next generation of tiny chips is a technique known as immersion lithography. FORBES: Magazine Article
Rival chipmakers switched to immersion lithography before Intel did. FORBES: Magazine Article